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1、運(yùn)動(dòng)控制產(chǎn)品方案集成陶斯亮13615818828taosiliang July, 2012明星產(chǎn)品介紹-控制器 ACS Motion Control-直線電機(jī)TECNOTON SAMICK-THK=氣浮軸承特色方案介紹-夕高精密平臺(tái) 客戶方案介紹-項(xiàng)目背景-項(xiàng)目方案說明-項(xiàng)目方案配置斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.提綱PRESTOSOLUTION明星產(chǎn)品之一一ACS運(yùn)動(dòng)控制產(chǎn)品1fl1SPiPlusSCSPiPkJSNTMMC4UkitSPdPlusCMntM

2、C4UdcUDMntUDMpcUDMpmSPuPlus SARSPuPlus. SAR.LTElbe (CAT Mster/SI aweMasterMasterMasterMasterSln/eSlaveSlaveSlave-Max. number of axes64643232822288Max. inumbe r of built-in drives828222Max. MPU/Eth&CAT rat kHz2222222221Analog interface 9 external drives-yn-yyDrive supply85-265,400 Vac100-265 Vac85-26

3、5,400 Vac24-60 VdC24-48 VdC100-265 VacSIN-COS encoderyyyyyyynAbsolute an codecsnynnyynnResolvernynnyynnHSSI channels-313nn33Host oomm unication channelsVirtual TCP/IP & Shared RAM1 x Ethernet (TCP/ IP)2 x RS2321 x Ethernet (TCP/IP)2 x RS2321 x Ethernet (TCP/IP)1 x RS232-2 x Ethernet (TCP/IP)2 x RS23

4、22 x Ethe rnet (TCP/IP)2x RS232PRESTOSOLUTIONMotion contro=ePCBASEDspiipcs PCIspiipcs NTM913615818828 raosEangdgmaFcomspiisus MC4USPiiP一us CMWspiiHus CMCopyrigh二 c) 2009、press socson co.、= Righk Reserved*ACS有什么?斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.控制器-帶

5、網(wǎng)絡(luò)獨(dú)立運(yùn)行式-NTM-帶驅(qū)動(dòng)式（帶網(wǎng)絡(luò)）CMnt/CM-板卡式-SPiiPlus PCI-獨(dú)立運(yùn)行式-SAR-*軟控制器SC-組合式-MC4U總線-*EtherCAT-CAN-HSSI-Modbus-Ethernet/IP驅(qū)動(dòng)器-*直線電機(jī)驅(qū)動(dòng)-伺服驅(qū)動(dòng)-步進(jìn)驅(qū)動(dòng)-*直流電機(jī)驅(qū)動(dòng)配件一一10模塊；脈沖輸出模塊；模擬量控制模塊；步進(jìn)電機(jī)控制模塊;斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTIONACS典型應(yīng)用框架一EtherCATUser Appli

6、catbnEthernetSPiiPlusNTM ElhorCAT MasterSPiiPlus lOMnt 32/32 Digits I/O PointsSRiPlus POMnt4 x Pulse/Dir InterfaceMC4Udc6*Axis Drive ModuleSPaPlus UDMnt 2-Axis Drive ModuleBSPiiPlusDCMC4Udc &Axis Drrve ModuleSPiiPlusDCUDMpm-2-3202-axis drive moduleCMntMC4UAxes and I/OsAxes and I/Os斯拓 13615818828 tao

7、siliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTIONACS典型應(yīng)用框架二EtherCATSPiiPlusDCAll n one:HMIUser ApplicationSPuPlus SC EtherCAT Master8-Axis Drive Module,.SPiiPlusDCMC4Udc 6Axis Drive ModuleSPiPlus UDMnt2-Axis Drive ModuleLMvaSPiiPlus PDMnt4 x Pulse/Dir Interlace.IPIJrl-

8、Ji Lrr.e ciUDMpm-2-3202-axis drive modulePC或者平板電腦（基于windows系統(tǒng)Axes and I/OsAxes and I/Os斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved. MC4U產(chǎn)品線 UDMnt/UDMpc -單軸/雙軸通用驅(qū)動(dòng)模 塊-最大母線電壓 60V

9、dcz 2.5A cont. / 5A peak, 5/10A, 10/20A-最大母線電壓320Vdc, 2.5A cont. / 5A peak, 5/10A, 10/20A斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.SDMnt -最多8軸步進(jìn)馬達(dá)驅(qū)動(dòng)模塊 單極性微步進(jìn)驅(qū)動(dòng)，40Vdc, 3.0A, 1

10、/16th_stepPDMnt - 4軸脈沖/方向控制接口模塊，自聲 帶8/8 I/OIOMnt -最多32點(diǎn)DI,32點(diǎn)DO模塊EtherCAT斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.ACS的網(wǎng)絡(luò)擴(kuò)展模塊一一通過HSSI總線擴(kuò)展斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.斯拓 13615818828 taosiliangCopyright (c

11、) 2009, Presto Solution co. All Right Reserved.通過HSSI擴(kuò)展模塊 HSSI-I016 -16/16 I/O 擴(kuò)展模塊 HSSI-ED2-2個(gè)第三方伺服軸接口模塊;-自帶 8DI,8DO HSSI-HES -絕對(duì)值編碼器接口模塊-EnDat 2.2 （海德漢接口類型）-Smart-Abs （Tamagawa接口類型）三相電機(jī)濾波器- For applications sensitive to radiated PWM noise Reduces sta ndstill jitter gen erated with PWM drives Smoot

12、h constant velocity Regenemtion Resistors斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION 有鐵心直線電機(jī):120N12750N 無鐵心直線電機(jī)：36N4200N 模擬爾傳感器低成本反饋元件數(shù)字爾傳感器斯拓 13615818828 taosiliang明星產(chǎn)品之Tecnotion直線電機(jī)Copyright (c) 2009, Presto Solution co. All Right Reserved.斯拓

13、13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.Fp=36 - 72NFc=1020NT-seties有鐵心線圈數(shù)U-series無鐵心斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.Fp=100

14、- 400NFc=22 116N9 - 4200N-846NuxxTULM0612S NSeries繞線方式TypeTBWFp=2700 6750NFc=600 2850N斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.TECNOTION直線電機(jī)選型軟件電機(jī)參數(shù)選擇斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.斯拓 13615818828 taosilia

15、ngCopyright (c) 2009, Presto Solution co. All Right Reserved.運(yùn)動(dòng)規(guī)劃設(shè)定應(yīng)用參數(shù)設(shè)定模擬一斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.明星產(chǎn)品之一一直線電機(jī)PRESTOSOLUTION Coil AssemblySD：20 |130B |Motor ModelSpecificati onsCodeSDM05CorelessSDM20SDM30CDM20Iron CoreCDM30CDM40A : Coil un

16、itBlank : Without hall sensorCoil TypeRated ForceCoil TypeRated ForceSDM0524B150BSDM20130BCDM20300B200B600B250BCDM30500BSDM30400B1000B500BCDM401600B斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION Coreless SDM model Core CDM model斯拓 13615818828 taosi

17、liang明星產(chǎn)品之一一直線電機(jī)Copyright (c) 2009, Presto Solution co. All Right Reserved.明星產(chǎn)品之一一直線電機(jī)PRESTOSOLUTION Magnet plateSDM20 |1Motor ModelSpecificati onsCodeCorelessSDM05SDM20SDM30CDM20Iron CoreCDM30CDM40B : Magnet plate600L| ModelLengthModelLength108270SDM05216CDM20405432540240607.5SDM20/30360480600720斯拓

18、 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.明星產(chǎn)品之Air Bearing的應(yīng)用貼片機(jī)半導(dǎo)體產(chǎn)業(yè)IT行業(yè)X-Y平臺(tái)高精密機(jī)械FPD Solution工業(yè)機(jī)器人高精密測(cè)三坐標(biāo)測(cè)儀斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION明星產(chǎn)品之Air-Bearings多種多樣的氣浮軸承斯拓 13615818828 taosiliangCo

19、pyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION斯拓 13615818828 taosiliangCopyrigh

20、t (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION空氣軸承設(shè)計(jì)和制造軟件明星產(chǎn)品之一一應(yīng)用：采用空氣軸承的高精密平臺(tái)Air-StageAir-Bearing Stage斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION斯拓 13615818828 taosiliang應(yīng)用：三坐標(biāo)測(cè)量?jī)xAir Bearings on a Coordinate Measuring Machi

21、neCourtesy L.S. StarrettCopyright (c) 2009, Presto Solution co. All Right Reserved.應(yīng)用：大型高精密平臺(tái)斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.斯拓 13615818828 taosiliangCopyright (c)

22、2009, Presto Solution co. All Right Reserved.Moving mass 移動(dòng)負(fù)載：l,800Kg類型：Linear Air-Bearing Stage, Dual X-Unit 行程：2,800mmA-line Making Machine , ADD -Repair Machine斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION應(yīng)用：大型高精密平臺(tái)G8 Air-Bearing Gantry XY Stag

23、e 2800 X 2540 Stroke斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTO產(chǎn)品類型Multi Orifice （多孔板），Ceramic porous （多孔陶瓷），Graphite Porous （多孔石墨）SOLUTION rO*n. hMulti Orifice 多孔板|Mi|Avtp*9 0/z .pl.ienowc1r*|SizeIdeal Road N (60psi)Support Air Prssureprice (US)0 50160

24、40 8080040 1001,30040 1252,10040 1503,1004Special ordercallcallcallSOLUTION rO*n. hGraphite Porous (多孔石墨)Maxiavm Pre*swe 3.9194 Average PvcMirc : 3.M9031St*c Force F2 :129B.S 143*9 |N|Stiltacas Qz : 3569574 pt/mlcromeRrlOnmpanQ 0? : ? 261S66 |N.nffc/m*cfnrwe1rr|SizeIdeal Road N (60psi)Support Air Pr

25、ssureprice (US)0 5030040 801,00040 1001,60040 1252,50040 1504,2004Special ordercallcallcallSizeIdeal Road N (60psi)Support Air Prssureprice (US)0 5030040 801,00040 1001,60040 1252,50040 1504,2004Special ordercallcallcallSOLUTION rO*n. hCeramic porous（多孔陶瓷）斯拓 13615818828 taosiliangCopyright (c) 2009,

26、 Presto Solution co. All Right Reserved.PRESTOk SOLUTION Resolution-分辨率 Accuracy-準(zhǔn)確度 Repeatability-重復(fù)定位精度 Flatness-平面度 Straightness-直線度 Orthogonally-正交性 Velocity Ripple-速度波動(dòng) In-position Stability-靜態(tài)位置穩(wěn)定度 Pitch-俯仰 Yaw 偏離 Travel/Stroke-行程 Max Velocity-最大速度 Max acceleration-最大加速度 G5-G11-5代線代線Clean clas

27、s-環(huán)境潔凈度要求斯拓 13615818828 taosiliangCop高精密平臺(tái)參數(shù)解釋yright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION應(yīng)用1:納米級(jí)平臺(tái)機(jī)械與控制雙方面配合達(dá)到 Jitter(In-position stability):位穩(wěn)態(tài)掛動(dòng)課差:峰峰值：0.42nm斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION應(yīng)用2： 7G,8G光阻涂覆平臺(tái)

28、及控制系統(tǒng)項(xiàng)目Specification （Achieved）達(dá)到的規(guī)格Travel （行程）3,600mmResolution （分辨率）10nmAccuracy （稲度）After Error Mapping 5pmRepeatability （重復(fù)定位稻度）土 1.5回Flatness （平面度）v5如Straightness （直線度）v 土 5如Max Velocity （最大速度）300mm/secMax acceleration （最大加速度）0.3GVelocity Ripple （100Hz）（速度波動(dòng)）土0.2% / 100mm/secVelocity Ripple （10

29、0Hz）（速度波動(dòng)）土0.1% / 200mm/sec斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION平臺(tái)：超稿密定位平臺(tái)及控制系統(tǒng) Gantry & H type air-bearing stage （龍門&H型氣浮 平臺(tái)； Laser Interferometer & Linear encoder feedback（激光干涉儀&線性編碼器反饋 Dynamic Yaw control ;動(dòng)態(tài)偏差控制項(xiàng)目Specification （Achieve

30、d）達(dá)到規(guī)格Travel （行程）200mmResolution （分辨率）10 nmAccuracy （楮度）After Error Mapping 0.6Repeatability （車復(fù)定位耦度）v 土 0.3 Flatness （平面度）土 0.25 如Straightness （直線度）土0.65 如Max Velocity （最大速度）100mm/secMax acceleration （最大加速度）0.2GIn-position Stability （靜態(tài)位置穩(wěn)定 度）lOnmVelocity Ripple （1kHz）（速度波動(dòng)）土0.1% / 20mm/sec斯拓 13615

31、818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.應(yīng)用3:激光應(yīng)用平臺(tái)（種類1）斯拓 13615818828 taosiliang應(yīng)用3:激光應(yīng)用平臺(tái)（種類1）斯拓 13615818828 taosiliang應(yīng)用3:激光應(yīng)用平臺(tái)（種類1）Y AXIS雙直線電機(jī)龍門系統(tǒng)LM直線導(dǎo)軌系統(tǒng)X AXIS直線電機(jī)系統(tǒng)氣浮軸承導(dǎo)軌系統(tǒng)陶瓷導(dǎo)軌系統(tǒng)平臺(tái)精度參照平臺(tái)尺寸5G, 6GZ 7G,8GZ8.5GZ 9G, 10G斯拓 13615818828 taosiliangPRESTOSOLUTION應(yīng)用4

32、:激光應(yīng)用平臺(tái)（類型2）Copyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION應(yīng)用4 :激光應(yīng)用平臺(tái)（類型2）Y AXIS雙直線電機(jī)龍門系統(tǒng)Twin Lin ear Motor System雙反饋系統(tǒng)Twin Encoder System直線導(dǎo)軌和氣浮混合系統(tǒng)LM Guide & AirBeaing Hybrid SystemX-AXIS直線電機(jī)系統(tǒng)Lin ear Motor System氣浮導(dǎo)軌系統(tǒng)Air Bearing Guide System花崗石導(dǎo)軌系統(tǒng)Granite Guide System平

33、臺(tái)精度參數(shù)參照平臺(tái)尺寸5d 6G, 7G, 8G,85G, 9G, 10GPRESTOSOLUTION應(yīng)用4 :激光應(yīng)用平臺(tái)（類型2）Copyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION應(yīng)用:氣浮龍門式8.5G平臺(tái)Air Bearing gantry stage項(xiàng)目unitX-axisY- AxisTravel （行程）mm2900 mm2100 mmResolution （分辨率）nm0.97 nm5 nmPosition Accuracy （定位精度）pm1 pm/Full stroke1 pm/

34、Full strokeRepeatability （重復(fù)定位旃度）pm0.25 pm0.25 pmFlatness （平面度）pm4 pm/Full stroke4 pm/Full strokeStraightness （直線度）pm5 pm/Full stroke5 pm/Full strokeOrthogonally （正交性）Arc-sec3 Arc-secPitch （俯仰）Arc-sec3 Arc-sec10 Arc-secYaw （偏離）Arc-sec3 Arc-sec7 Arc-secLoad capacity （max）（最大 負(fù)載）Kg500 Kg3,000 KgVeloci

35、ty （max）（最大速度）mm/sec1200 mm/secAcceleration （max）（最大加 速度）G0.3G0.3GPosition stability （位置穩(wěn)定度）pm0.1 pm0.1 pmVelocity ripple （速度波動(dòng)）%土 0.05% 200mm/s ec0.05%200Class 100Clean class （環(huán)境潔凈度）斯拓 13615818828 taosiliangCopyright （c） 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION應(yīng)用6:直線導(dǎo)軌龍門式8G平臺(tái)LM G

36、uide Gantry stageITEM （項(xiàng)目）unitX-axis （lower）Y-Axis （upper ）Travel （行程）mm2800 mm1500 mmResolution （分辨率）nm1 nm5 nmPosition Accuracy （位置耦度）pm2 pm/full stRepeatability （重復(fù)定位梢度）pm3 pm/full st3 pm/full stFlatness （平面度）pm10 pm/full stStraightness （直線度）pm15 pm/full st15 pm/full stOrthogonally （正交性）Arc-sec5

37、Arc-secPitch& yaw （俯仰/偏離）Arc-sec5 Arc-sec10 Arc-secLoad capacity （max）（最大負(fù)載）Kg500 KgVelocity （max）（鍛大速度）mm/sec1200 mm/sec1200 mm/secAcceleration （max）（最大加速度）G0.3G0.3GPosition stability （靜態(tài)位置穩(wěn)定度）pm0.1 pm0.5 pmVelocity ripple （速度波動(dòng)）%Under 0.2%Clean class （環(huán)境潔凈度）Class 100斯拓 13615818828 taosiliangCopyri

38、ght （c） 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION應(yīng)用7: Semiconductor Inspection Stage & Control system 半導(dǎo)測(cè)平臺(tái)及控制系統(tǒng)ITEM （項(xiàng)目）unitX-axis （lower）Y-Axis （upper）Travel （行程）mm450mm390mmResolution （分辨率）nmlOnmPosition Accuracy （位置稻度）pm土 1 pm/full st0.75 pm/full stRepeatability （重復(fù)定位精度）pm1 pm/

39、full st1 pm/full stFlatness （平面度）pm5 pm 310mm1 pm 310mmStraightness （直線度）pm土 1 pm 10mm0.2 pm 10mmOrthogonally （正交性）Arc-sec5 Arc-secPitch&yaw （俯仰/偏離）Arc-sec土 10 Arc-sec土 10 Arc-secLoad capacity （max）（最大負(fù)載）Kg60 Kg15KgVelocity （max）（最大速度）mm/sec500 mm/sec500 mm/secAcceleration （max）（最大加速度）G0.8G0.8G斯拓 13

40、615818828 taosiliangCopyright （c） 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION應(yīng)用8 : Semiconductor Inspection StaITEM （項(xiàng)目）Y Axis （Stepping, under）Travel （行程）400mmIn-position Stability （靜態(tài)位置穩(wěn)定度）50nmRepeatability （車復(fù)定位精度土 lum/F.TMax. Velocity （最大速度）300mm/sMax. Acceleration （最大加速度）0.3GVel

41、ocity Ripple （速度波動(dòng)）N/AStraightness （直線度）10um/全行程斯拓 13615818828 taosiliangje & Control system半導(dǎo)體檢測(cè)平臺(tái)及控制系統(tǒng)X Axis (Scanning, upper)Theta (Rotation)Etc.450mm90M 土 50nmlum/F.T1.3 (土0.0003 )(Bi-directi onal)300mm/s0.3G280rad/s2土 0.03%/200mm/sN/Av 土 5um/全行程N(yùn)/AAt the top plateCopyright (c) 2009, Presto Solu

42、tion co. All Right Reserved.PRESTOSOLUTION典型客戶COSOONHAN raiCKStM irrrwi a urmwa斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTIONJJUSTEKV Linear Motion Te

43、chnologyobostar斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTIONSNU Precision Co.,Ltd.斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. Al

44、l Right Reserved.PRESTOSOLUTIONHBLHanBit Laser Corp.KANGMAE PREC1SOR SYSTEMI (?)0|0|x|a|Ett3X|斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTION斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.PRESTOSOLUTIONAUROSTechnvhecapionK-MAC SEMESKorea Materials & Analysis Corp.GSbiol f i祚t & Best Im!SECRODTOP ENGINEERINGSAMICKTHK斯拓 13615818828 taosiliangCopyright (c) 2009, Presto Solution co. All Right Reserved.Thank you !PRESTOSOLUTION