【機械類畢業(yè)論文中英文對照文獻翻譯】NiCrNiSi 薄膜熱電偶測溫刀具傳感器動態(tài)標定【PDF英文6頁word中文翻譯3718字9頁】【有出處】
【機械類畢業(yè)論文中英文對照文獻翻譯】NiCrNiSi 薄膜熱電偶測溫刀具傳感器動態(tài)標定【PDF英文6頁word中文翻譯3718字9頁】【有出處】,機械類畢業(yè)論文中英文對照文獻翻譯,PDF英文6頁,word中文翻譯3718字9頁,有出處,【機械類畢業(yè)論文中英文對照文獻翻譯】NiCrNiSi,薄膜熱電偶測溫刀具傳感器動態(tài)標定【PDF英文6頁,word中文翻譯3718字9頁】【有出處】,機械類
CHINESE JOURNAL OF MECHANICAL ENGINEERING 、,0124,No1,2011 73 DOI:103901CJME2011川073,available online at帆cjmetcom;wwwcjmenetcomcn Dynamic Calibration of the Cutting Temperature Sensor of NicrNiSi Thin一1film Thermocouple CUIlnxianl厶,YANG Deshunl,JIA Ying,ZENG Qiyonf,and lSUN Baoyua吖V 、r 一L-_J 、School對Mechnnicnt EngineeringDniinn Jidotong Universit)Dnlinn l J 6028,China 2 Ke)Labomtory加r Precision dnd NDn一打ndffionnl Mnchinmg Technolo斟可M灑istry可Education, Dnlinn Universi嗲9f。rechnologyDntidn l l 6024china 3 coltege叮Quntit)S啦哆Engineer訊gChinn點tinng UniversiHnngzhoH 3 l0018Chinn ReceiVed Dcc咖ber 22,2009;嗽,ised July 27,2010;acc印ted Septembcr 30,20lO:published elec仃onically October 14,2010 Abstract:In high-speed cutting,namral thermocouple,artificial the腫ocouple and infhred radia“on temperature measurement are 璐ually adopted for measuring cuning temperature,but these methods have di陌culty in measuring nansient temperatllre accurately of cutting area on account of low response speed and“mited cutting conditionIn this paper,NicrNisi thinfilm thernlocouples(TFTcs) are fabricated according t0 tempemture characteristic of cutting area in hjgh-speed cuning by means of adVanced t、vinned micmwaVe elecnl0 cyclotmn rcson鋤ce(MWECR)plaSma source enhanced radio fkquency(RF)reaction non-balance magnenon spunering technique, and c鋤 be used for tmnsient cutting tempe咖re measurement111e time constants of the TFTCs with different the咖ojunction film width are measured at fbur kinds of sampling仔equency by using ult豫一CFR short pulsed las盯system that establishedOnedimensional unsteady heat conduction model is constructed and the dvnamic perflormance is analyzed theoreticallyIt c蜘be seen fbm the analvsis results that the NiCrNisi TFTCs are suitable for measuring transient temperature which varies quickly, tlle response speed of TFTCs can be obviously improved by rcducing the thickness of thinfilm,and the area of thernloiunction has littIe influence on dynamic response timeThe dynamic calibration experiments are made on the constnlcted dynamic calibration system, 卸d the experimental results confim that sampling仃equency should be larger tIlan 50 kHz in dynamic measurement for stable response time,鋤d the shonest response time is 0042 msMeasurement memods and devices of cuning heat and cu砸ng tempemture me邪urement are developed鋤d improved by this research,which pmVide practical methods and iIlsnuments in monitoring cuttiIlg heat 鋤d cutting temperatIlre for research and production in highspeed machining Key words:thinfiIITl themlocouple,cutting temperature sensordynamic calibration,onedimensional unsteady heat conduction, response time l Introduction ln highspeed cu竹in 2,95of cu仕ing heat will tmnsmit to the chip,which will be local melted on the interface contacting with rake face,and a layer of extremely thin liquid film will be fomedThe chip will be instantaneousIy cut off from the wOrk piece during cutting without naditional plastic defbnnation,so it is very inlponant to measure the temperature of the cutting area accuratel y Thinfilm themocouples(TFTCs)are advanced sensors for transient temperature measurement and the measurement principle is the same as nornla】thennocoupIesBecause of the small thennal capacity and fhst response,TFTCs can measure仃ansient temperature accuratelyI卜引The dynamic calibration of TFTCs is used to measure the response Corresponding authoL Email:dlcyx0071 26com Thjs proicct is supported bv NationaI NaturaI Science Foundation of Chjna (Grant No 507752 l O), Liaoning Pmvincial Natural Science Foundation of China(Grant No20062 1 43),and Liaonin衛(wèi)Provincial Universities Science 鋤d Tcchnology Pro鯽m of China(Grant No 05L0231 process of temperature sensors Versus temperature signal There are three methods for the dvnamic calibration of ordmary wlretype themOcOuple: step response,lmpuJse Isponse and slope responseThese methods all consider dVnamic calibration of thennocouple as a nrst order inertial loopThe dynamic response time is calibrated with dvnamic ca“bration curve and larger errors will occur while it is calibrated bV the ordinarV calibration methods Currentlyj more advanced methods are basically based on laser dVnamic calibration for dvnamic time of TFTCs【川 CHOI,et al川,adopted K model thinfilm thernlocouple scattered around the laser Dath to observe the conversion of laser welding energy,in order to monitor the disbution of energy in laser welding processYANG【訓used a continuous carbon dioxide Iaser and neodymiumdoped glass pulsed laser as the excitation heat source for static and dvnamic calibration of 的nsient high-temperature sensors, by drawing on their predecessors using laser heated TFTC for dynamic calibration techniqueThe system was designed bV using integration of static and dynamicThe systematic errors genemted by the di髓rences of heat radiatiOn 萬方數據 。74。 CUI Yun)【ian,et al:D”amic Calibration ofthe Cuttjng Temperature Sensor ofNiC州iSj Thinfilm 111ennocouple coe幣cient and location movement were eliminatedOther heat equipments which produce仃ansient temperature rise can also be used for incentives dynamic heat in the sVstem of dynamic calibration of TFTCs exc印t adopting laser嬲 heat source for experiment of dynamic calibrationQIAN, et al【川,carried out a cenain amount of research work usin2 heating circuit as the heat source in the dynamic calibration expenment 1n this research,the fabrication of TFTCs is intmduced and the compositions are measured by electron probe firstl y Then,dynamic perfbnnance of TFTCs is researched by the combination of calculation with measurementThe time constants of the TFTCs with dif詫rent thennoiunction矗lm width are measured at dif詫rent sampling行equencyFinally, the shortest respOnse time is given 2 Fabrication of NiCrNiSi Thin Film of NiCr thin filmMeatl rou曲ness of the NiCr thin film is 484 nm,and the mean roughness of the NiSi thin film is 033 nmIt can be seen f沁m me results above that the alIoy composite elements of the prepared NiCrNiSi films are closed to the tarl=etThey are compact unifo咖,smooth and continuity good,which meet the fabrication requirement for temperamre measurement of cutter sensor NiCrNiSi is a widely used cheap metallic thermocouple materialThe highest temperature can reach 900for lon2一ternl use and l 200for shortte腫use The anti-oxidation abilitv and corrosion resistance of this thenllocouple material孤e s仃Dng as thennoelectric Fig1 SEM images of the surface of NicrNisi thin fiIms propenies, good Iinearit) and high sensitiVity; etc NiCrNiSi is chosen as thinfilm electrode materials in this study, which can meet t11e requjrement of cutting temperatLlre testlng Several methods can be used to prepare NiCrNiSi thin一行l(wèi)ms, for example, vacuum evaporation, spuner deposition,and ion plating method 【8 91 NiCrNisi thinfilms are prepared by means of advanced twinned microwave electm cyclotron resonance(MWECR)pIas眥 source enhanced radio fequency(RF)reaction nonbalance magnetron sputtering techniqueo 1川Without considering the proIifemtion of alloy composition caused by the increasing tempemture of target and the reevapomtion on the substrate,the spunering thin nlms can be obtained,whose components are the same aS the targetsThe composition of NiCrNiSi thin films measured by electmn probe is sho、vIl in T曲le 1It can be seen fbm 1able l that the comDosition of sputtenng thin films is nearly the same as the composition of the targets Fig2 AFM images of the surface of NiCrNiSi t11in filIIls 1abIe 1 Comparison of the compositions Of thin矗lms and targets Fig1 and Fig2 show the scanning electron microscope (SEM)images and atomic force mjcroscope(AFM)images of NiCrNiSi nlms,respectivelyFrom Fig1,it can be seen ttlat the compactness of the NiCrNiSi film is unifoml and the continuity is 200dFrom Fig2,it can be seen that the su雨ce of NiSi thin nlm is much more smootll than that 3 TheoreticaI Analysis of Dynamic Perfbrmance TFTCs were deposited on the subsn翟te coated with siljcon surface ofhighspeed steel djoxjde insulating fjlm Because the thicl(11ess of ma們x is very Iarge com口ared with that of thinnlm,it can be re2arded as a semiinfinite in a onedimensional unsteady heat conduction process【11 J Silicon dioxide has Iow thennal conductivitvwhich is much smalIer than that of NiCrNiSiThe influence of si“con dioxide can be ignored because of multi1aVer 萬方數據 CHINESE JOURNAL OF MECHANICAL ENGINEERn呵G 75 thickness of the filmsOnlv the influences of NiCrNiSi thinfilm in tempemture conduction process were studied and the efrects of different thickness of NiCrNiSi thinfilm on the dynamic response time at room temperature were calculatedWe assume that the physical propenies of materials do not change with temperature, because temperamre upper limit of sensor is much lower than the melting temperature of thinfilm and subsnate materialsThe heat transmission is along x direction(by assumption the vertical direction along the membrane towards matrixoriented),as shown in Fig3 Fig3 Heat conduction model Supposing that the suIface of thin-film generates a temperaturc step,貝,)=俠is equal to a constant,the distribution fhnction of NiCrNiSi thin-film is臼l,f),we can obtain 掣: 色 “ 一尺 P畹 3萬而 一 where 另(點f卜_Temperature distribution fhnction, 夙一St印temperature signal, P疵()弋:omplementary error劬ction, 萬Thickness ofNiCr tllin nlm fHeat transmissiOn time _Themal di硒sivity of NiCr thin filIIl, Ko九elation coemcient K= 一l+粵 厶 1+生 厶 where 啦Thermal difmsiVity of matrix, Zl,如-Themlal conductiVity oftIlmfihn鋤d ma硎x MOreOver (y)=1一鉗(y)=l一去上。exp(彳)d五= 去fexp(-確艦 、,11en口lc龜,五1,五2孤e substituted into Eq(4),K=09 l 2 Substituting K,萬into Eq(3),we caIl get lhat the time constant of thin一行l(wèi)m sensor f is 320 l l nsas shown in Table 2 Thble 2 Response“me of diff打ent thjckness of thin一矗hns 塑望竺! 墨!嬰墮! 蘭!竺生; T11ickness別“m 289 378 Th。mal。o“d”。i”時 OmO 842 O040 842 (calcmsK) 堅!巴!苧塑!型! i:! !:!竺! 、 It can be concluded from the above results that the main f-actors which innuence time constant f of thinnlm are mennal difrusivitytherml conductivitv棚1d film thickness of minfilm materials Moreover time constant z-is proportional to the thickness萬of thermoiunctionThe response speed of thinnlm thennocouple can be obviously inlproved by reducing the thickness of thinfilm When f=易(點力=0632鏷,we substitute it into Eq(1), 鋤d can obtain the following: l一 一K 一l咯 一e血 一e =0632 4 Measurement of Dynamic Resp仰se Tjme and ResuIts Analysis In order to research the effect impacting on time constant, of the abrasion of TFTCs a series of area of thenno-junction were prcparedT11e areas are 10 mm25 mm,08 mm25 mm,05 mm25 mm,03 mm25 mm, respectiVelyThe series of TFTCs is shown in Fig4 m 41 Dynamic response test scheme of TFTCs 、- In this paperUltraCFR shon pulse laser has been used where P“卜電auss error mnction, f一Time cOnstant When x is small,complementary error function is close to linear,P“3x)3PrfO),Eq(2)can be simplified嬲 (12K)咯 =0368 as the incentive heat sourceThe parameters of laser are as follows:repetition 6-equency is l一20 kHz,pulse dumtion is stationary 8 ns,lasers ene唱y is 01O5 mJ,and repetition f把quency is set at 1 O kHzEnergy is selected as hi曲as possible in Order to make temperature cue more obviouslyAccording to experiment,03 mJ is chosen as the parameter of laser incentiVe heat sourceTbst principle is shownin Fig5 南 萬方數據 。76 CuI Yunxiaflet aJ:Dynamic Calibration ofthe Cutting Temperamre Sensor ofNiC州iSi nlinnlm The珊ocouple Fig4 A series of TFTCs t Fig5 Scheme of dynamic calibrating fortempemtIlre measurement ofTFTCs I11e output of the laser was absorbed by thm-fllm themlocouple cutter sensor,the signal was amplified for l 000 times with precision amplifier circuit and thennal electric-potentiaI signaI that sensor exponed was gathered by DT9800 acquisition cardThe sensor and testing system was in grounding t0 decrease the interlbrence on signal conditioning circuit and recording ins仃uments caused by laser power supply and other elec仃Dmagnetic deVices,in order to ensure the acc啪cy of dyllamic characteristics testing 42 Dvnamic response“me measurement of thin行l(wèi)m thermocouple at diff電rent thermoiunction width Ul仃aCFR short pulsed laser has been used,the pulse width was 8 ns,repetition仔equency was l Hz and Iasers energy was 03 n1J Data were coIIected by DT9800 acquisition card,and time constant was measurcd when the姍oiunction width were 03,05,08,10 mm,respec- tivelyThe response curve at l Hz repetition fkquency and l oo kHz sampling仃equency is sho、VIl in Fig6 s鋤pIlng tlme fs Fig6 Impulse respOnse cue The time constant cue with diaerent width of hot junction is shown in Fig7From Fig7,it c撲be secll that when area of thennal contact is reduced to 33 times,the di俄rence of response time was small E 耋一 熬 C 器 E 0 0 02 04 O 6 O 8 1O l 2 width ofhot j帥ction訓mm Fig7nme constant cue of four TFTCs Heat capacity is the main factor that influenced the response time of wire t11in61m thermOcouple,which is obtained bV the thickness multiplying the盯ea of thinfilm the咖ocouple,so the mickness and area of the TFTCs are the main factors that innuenced the resDonse timeIt can be infbrred丘om the fbnnula of heat nansfbr model that ttle area has nO eff-ect on macroscoDic themal vOlume when the area changed 3 times or even 30 times,because the thickness of thinfilm is 1 O-一l 0_j times smaller than that of blockIn conclusionthe thickness of thinfilm is t11e most imponant factor that innuences response tirne 43 DVnamic response“me measurement or thin-mm thermocouple in diffbrent sampIing fequency When the sampling f托quency were l 0 kHz,50 kHz,and l 00 kHz under the same testing conditions, me thennoiunction width was 05 mm and the time constants were 0224 ms,01 26 ms,and 0095 ms,respectivelyThe relationship of response time and sampling仔equency is shown in Fig8DynaITlic response time decreased as the sampIing f-requency in the range 0f l 0 kHz to 50 I【HzThe time sampling行equency of the testing system should be larger than 50 kHz in order to obtain the steady test results s鋤pling fcqu朋cy冊Hz Fig8 Relationship of response time 鋤d sampIing frcquency Hz Hz Hz 44 Deviation analysis There is great di仟erence be聃een calculated values卸d measured values of time constaIlttlle main reasons can be summed up as follows T1QE=ocod吶Q崔O 0 O O O O O O O O 一:弋拱cods2簀In厶一 萬方數據 CHINESE JOURNAL OF MECHANICAL ENGINEERING 77 r1)The 1aser on the surfke of TFTCs is an extremely complex process,when dynamic chamcter of thinfilm ttle咖ocouple is regarded as one order iIlertiallink,me time constant precision is poor by output cun,e estimating (2)In this research,the influence of NiCr thinfiIm in temperature仃ansmission has been investigated,while the influence of silicon dioxide is ignored in calculationThe thenml conductivitv of thinnhn is substituted bv that of blockwhich innuences calculated valuesis smaller than measured value (3)The electrode of thinfilm is allov material,the咖al diHusivi哆and themlal conductivity coef_ficient change along with me material compositionThe composition of the eIec打ode is an important influence f砬tor to time COnStant (4)Laser modulation is not taken int0 account to reduce the error of dynamic response time constant as much as possible The test accuracy could be improVed by increasing impact enerlgy and reducing the pulse width of thelaser 5 C0nclusiOns n)The time constant of cutter measurement sensor made by means of advanced twinned M、v-ECR plas眥source enhanced RF reaction nonbalance magnetrOn sputtering technique c卸reach to microsecond,which is suitable for measuring transient temperature that Varies quickl yIt c鋤 be concluded fom the measured values that there was little influence of the area of thennoiunction of this sensor on the dynarnjc response time (2)lt can be leamed仔om the calculated result that time constant r is proportional to the thickness萬of memo junction,the response speed of thinfilm thennocouple can be obViously irnproVed by reducmg the thickness of the thinfilm (3)The system for measuring dynamic response time by means of Unla-CFR shon pulsed laser is constructed and the pulse width of laser is 8 nsSampling frequency call reach to l OO kHzThe shortest response time of test is 0042 ms (4)Samp“ng讎quency should be la唱er than 50 kHz wh朗dynarnic response time is measured by short pulsed 1aser References 【1】也IDER K G Thin film the丌Tlocouples for intemal combustion engines【J】而“朋口,紇刪“朧f鐘cP7醣no幻爿,1986,4(6): 2 6182 623 【2】LEI J F,HERBERT A w111infilm the咖ocouples鋤d strain_gauge techn0109ies and stmin gauge tecllllologies for cIlgine applicationsJ】 S甜玨D,百口甩dcf“口fD,了一,1988。65(2):187一193 【31 DUB SERl0 B,NIKA PRENEL J PS協tic鋤d dynamic calibration of thinfnm themlocouples bv meaIls of a laser modulation technique【J】R即f洲礦Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education,Dalian University of Technology, Dalian 116024, China), YANG Deshun,JIA Ying(School of Mechanical Engineering, Dalian Jiaotong University, Dalian 116028, China), ZENG Qiyong(College of Quality YUST M;KREIDER K G Transient thermal response of plasma-sprayed zirconia measured with thin film thermocouples 1990(02) 2.DUB SERIO B;NIKA PRENEL J P Static and dynamic calibration of thin-film thermocouples by means of a laser modulation technique外文期刊 2000(11) 3.LEI J F;HERBERT A W Thin-film thermocouples and strain-gauge technologies and strain gauge technologies for engine applications 1988(02) 4.KREIDER K G Thin film thermocouples for internal combustion engines 1986(06) 5.WANG Buxuan Heat and mass transfer in engineering 1998 6.CUI Yunxian;YANG Deshun;ZENG Qiyong Fabrication and characterization of NiCr/NiSi functional thin films on temperature measurement of cutter sensor 2010(03) 7.XU Jun;MA Tengcai;LU Wenqi A new method for thin film deposition -faced microwave electron cyclotron resonance plasma source enhanced direct-current magnetron sputtering期刊論文-Chinese Physics Letters 2000(08) 8.SCHILLER S;HEISIG U;KORNDORFER C Reactive DC high rate sputtering as production technology 1987(04) 9.QIAN Lan;CHEN Ning Experiment research of response time of thin-film thermocouple 1998(02) 10.YANG Shuping Time constant measurement of thermocouple by modulated laser期刊論文-Journal of North University of China 2007(03) 11.CHOI H;LI X C Fabrication and application of micro thin film thermocouples for transient temperature measurement in nanosecond pulsed laser micromachining of nickel 2007(08) 本文鏈接:
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機械類畢業(yè)論文中英文對照文獻翻譯
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【機械類畢業(yè)論文中英文對照文獻翻譯】NiCrNiSi
薄膜熱電偶測溫刀具傳感器動態(tài)標定【PDF英文6頁,word中文翻譯3718字9頁】【有出處】
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【機械類畢業(yè)論文中英文對照文獻翻譯】NiCrNiSi 薄膜熱電偶測溫刀具傳感器動態(tài)標定【PDF英文6頁word中文翻譯3718字9頁】【有出處】,機械類畢業(yè)論文中英文對照文獻翻譯,PDF英文6頁,word中文翻譯3718字9頁,有出處,【機械類畢業(yè)論文中英文對照文獻翻譯】NiCrNiSi,薄膜熱電偶測溫刀具傳感器動態(tài)標定【PDF英文6頁,word中文翻譯3718字9頁】【有出處】,機械類
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